Semiconductor industry: wafer fab exhaust management
Auteur :
Sherer, J. Michael
Éditeur :
Taylor & Francis Inc
ISBN :
9781574447200
Date de publication :
23 juin 2005
Dimensions :
23,4 x 15,6 cm
Poids :
453 g
Langue :
Anglais
Pays d'origine :
USA
Given the myriad exhaust compounds and the corresponding problems they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, this book offers guidance on selecting an appropriate system for a given application.