Nano lithography
Éditeur :
ISTE Ltd and John Wiley & Sons Inc
ISBN :
9781848212114
Date de publication :
14 janv. 2011
Dimensions :
23,6 x 16,0 x 2,5 cm
Poids :
635 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Lithography is a complex tool based on the concept of imprinting an original template version onto mass output originally using relatively simple optical exposure, masking, and etching techniques, and now includes exposure to X-rays, high energy UV light, and electron beams in processes developed to manufacture everyday products.