Ferroelectric dielectrics integrated on silicon
Éditeur :
ISTE Ltd and John Wiley & Sons Inc
ISBN :
9781848213135
Date de publication :
25 oct. 2011
Dimensions :
24,1 x 16,5 x 3,1 cm
Poids :
807 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films.