Advances in multiphysics simulation and experimental testing of mems
Éditeur :
Imperial College Press
ISBN :
9781860948626
Date de publication :
31 juil. 2008
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Takes a multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. This title includes chapters which present many of the developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations.