Levitation micro-systems: applications to sensors and actuators
Auteur :
Poletkin, Kirill
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783030589103
Date de publication :
19 nov. 2021
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.