Design and manufacturing of active microsystems

Éditeur : Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN : 9783642129025
Date de publication : 10 mars 2011
Dimensions : 23,5 x 15,5 cm
Langue : Anglais
Pays d'origine : Allemagne

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

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