Development and characterization of a dispersion-encoded method for low-coherence interferometry
Auteur :
Taudt, Christopher
Éditeur :
Springer Fachmedien Wiesbaden
ISBN :
9783658359256
Date de publication :
17 nov. 2021
Dimensions :
21,0 x 14,8 cm
Langue :
Anglais
Pays d'origine :
Allemagne
During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated.