Silicon semiconductor technology: processing and integration of microelectronic devices
Auteur :
Hilleringmann, Ulrich
Éditeur :
Springer Fachmedien Wiesbaden
ISBN :
9783658410407
Date de publication :
3 août 2023
Dimensions :
24,0 x 16,8 cm
Langue :
Anglais
Pays d'origine :
Allemagne
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit.