Introduction to physics and technology of thin films, an
Auteur :
Yuming, Wang
Éditeur :
Yuming, Wang
ISBN :
9789810216160
Date de publication :
9 janv. 1994
Dimensions :
22,0 cm
Langue :
Anglais
Pays d'origine :
Singapour
Based on lecture notes that have been used by the authors for the past ten years, with revisions made each year, this book introduces the concept of thin-film physics and technology, describes the various deposition procedures and illustrates PVD methods, evaporation and sputtering.