Design and development of mems based guided beam type piezoelectric energy harvester
Auteur :
Saxena, Shanky / Sharma, Ritu / Pant, B. D.
Éditeur :
Springer Verlag, Singapore
ISBN :
9789811606083
Date de publication :
7 avr. 2022
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Singapour
This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters.