Dual-mass linear vibration silicon-based mems gyroscope
Auteur :
Cao, Huiliang
Éditeur :
Springer Verlag, Singapore
ISBN :
9789811992490
Date de publication :
19 avr. 2024
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Singapour
The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.It presents the principle, structure and related technology of silicon-based MEMS gyroscope.