Scanning electron microscope optics and spectrometers
Auteur :
Khursheed, Anjam
Éditeur :
World Scientific Publishing Co Pte Ltd
ISBN :
9789812836670
Date de publication :
3 nov. 2010
Langue :
Anglais
Pays d'origine :
Singapour
Contains proposals to redesign the scanning electron microscope, so that it is compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. This book emphasizes the concepts underlying spectrometer designs in the scanning electron microscope.