Ion implantation into semiconductors, oxides and ceramics: volume 85
Éditeur :
Elsevier Science & Technology
ISBN :
9780080436135
Date de publication :
1 mars 1999
Dimensions :
27,9 x 21,0 cm
Poids :
1490 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Includes proceedings which contain the papers presented at the Symposium on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held in France in 1998. The aim of the symposium was to provide a forum for the discussion of results in the implantation of materials from three different classes: semiconductors, oxides and ceramics.