Rf power for industrial applications
Auteur :
Frenzel, Louis E.
Éditeur :
Frenzel, Louis E.Adamson, Thomas A.,
ISBN :
9780130965776
Date de publication :
21 mai 2003
Dimensions :
25,0 x 15,0 x 1,5 cm
Poids :
508 g
Langue :
Anglais
Pays d'origine :
USA
Focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power. This book is useful for 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments.