Nanofabrication using focused ion and electron beams: principles and applications
Éditeur :
Oxford University Press Inc
ISBN :
9780199734214
Date de publication :
24 mai 2012
Dimensions :
18,8 x 25,7 x 4,8 cm
Poids :
2157 g
Langue :
Anglais
Pays d'origine :
USA
This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.