High resolution focused ion beams: fib and its applications: the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology
Auteur :
Orloff, Jon
Éditeur :
Orloff, JonSwanson, Lynwood,Utlaut, Mark,
ISBN :
9780306473500
Date de publication :
1 oct. 2002
Dimensions :
23,5 x 15,5 x 2,0 cm
Poids :
1390 g
Langue :
Anglais
Pays d'origine :
USA
Suitable for both the user and the designer of FIB instrumentation, this book focuses on high resolution focused ion beams (FIBs).