Lecture notes on principles of plasma processing
Auteur :
Chen, Francis F.
Éditeur :
Chen, Francis F.Chang, Jane P.,
ISBN :
9780306474972
Date de publication :
1 janv. 2003
Dimensions :
27,9 x 21,0 x 1,2 cm
Poids :
1140 g
Langue :
Anglais
Pays d'origine :
USA
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. This title introduces basic plasma concepts to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.