Capacitive silicon resonators: performance enhancement methods
Auteur :
Van Toan, Nguyen / Ono, Takahito
Éditeur :
Taylor & Francis Ltd
ISBN :
9780367217761
Date de publication :
24 juin 2019
Dimensions :
23,4 x 15,6 cm
Poids :
370 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.