Adhesion aspects in mems/nems
Éditeur :
Taylor & Francis Ltd
ISBN :
9780367445942
Date de publication :
9 déc. 2019
Dimensions :
24,5 x 17,0 cm
Poids :
780 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
This book discusses equilibrium vapor adsorption and capillary force, and effects of contacting surfaces on MEMS device reliability. It serves as a fountainhead for new research ideas and new application vistas and enhances the performance and durability/robustness of MEMS/NEMS.