Physics of radiofrequency capacitive discharge
Auteur :
Savinov, V. P.
Éditeur :
Taylor & Francis Ltd
ISBN :
9780367571627
Date de publication :
30 juin 2020
Dimensions :
23,4 x 15,6 cm
Poids :
453 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.