Wafer manufacturing: shaping of single crystal silicon wafers
Auteur :
Kao, Imin / Chung, Chunhui
Éditeur :
John Wiley & Sons Inc
ISBN :
9780470061213
Date de publication :
29 janv. 2021
Dimensions :
24,4 x 16,8 x 2,2 cm
Poids :
680 g
Langue :
Anglais
Pays d'origine :
USA
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.