Spectroscopic ellipsometry and reflectometry: a user's guide
Auteur :
Tompkins, Harland G. / McGahan, William A.
Éditeur :
John Wiley & Sons Inc
ISBN :
9780471181729
Date de publication :
6 avr. 1999
Dimensions :
24,0 x 16,0 x 2,0 cm
Poids :
533 g
Langue :
Anglais
Pays d'origine :
USA
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.