Handbook of chemicals and gases for the semiconductor industry
Auteur :
Misra, Ashutosh / Hogan, Jeremiah D. / Chorush, Russell A.
Éditeur :
John Wiley & Sons Inc
ISBN :
9780471316718
Date de publication :
5 avr. 2002
Dimensions :
24,0 x 15,9 x 2,4 cm
Poids :
644 g
Langue :
Anglais
Pays d'origine :
USA
This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips.