Delta-doping of semiconductors
Éditeur :
Cambridge University Press
ISBN :
9780521017961
Date de publication :
22 août 2005
Dimensions :
24,7 x 19,0 x 3,1 cm
Poids :
1081 g
Format :
Trade paperback (US)
Langue :
Anglais
Pays d'origine :
Grande Bretagne
This book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology.