Soft x-rays and extreme ultraviolet radiation: principles and applications
Auteur :
Attwood, David
Éditeur :
Attwood, David
ISBN :
9780521029971
Date de publication :
22 févr. 2007
Dimensions :
25,3 x 17,7 x 2,6 cm
Poids :
870 g
Format :
Trade paperback (US)
Langue :
Anglais
Pays d'origine :
Grande Bretagne
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.