High k gate dielectrics
Éditeur :
Taylor & Francis Ltd
ISBN :
9780750309066
Date de publication :
1 déc. 2003
Dimensions :
23,4 x 15,6 cm
Poids :
1179 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
The drive toward smaller and smaller electronic componentry of microelectronics is demanding new materials with higher electrical permittivity. An impressive collection of methods with in-depth coverage, High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Leading researchers from Europe and the USA de