Microfabrication and nanomanufacturing
Auteur :
Jackson, Dr. Mark J.
ISBN :
9780824724313
Date de publication :
10 nov. 2005
Dimensions :
25,4 x 17,8 x 2,7 cm
Poids :
884 g
Format :
Unsewn / adhesive bound
Langue :
Anglais
Pays d'origine :
USA
Honing on the increased activity in nanotechnology driven by economic necessity, this book examines the technology of fabrication and manufacturing of engineering materials at the micro- and nanoscale. It also describes the construction of microscale components using lithographic techniques, including examples of LiGA and deep X-ray lithography.