Handbook of photomask manufacturing technology
Éditeur :
Taylor & Francis Inc
ISBN :
9780824753740
Date de publication :
7 avr. 2005
Dimensions :
25,4 x 17,8 cm
Poids :
1428 g
Langue :
Anglais
Pays d'origine :
USA
Offers a comprehensive summary of the various areas of mask technology. This work discusses conventional masks and their supporting technologies, as well as technologies such as extreme ultraviolet, electron projection, ion projection and X-ray lithography.