Fabrication of silicon microprobes for optical near-field applications
Auteur :
Minh, Phan Ngoc / Takahito, Ono / Masayoshi, Esashi
Éditeur :
Taylor & Francis Inc
ISBN :
9780849311543
Date de publication :
15 janv. 2002
Dimensions :
23,4 x 15,6 cm
Poids :
408 g
Langue :
Anglais
Pays d'origine :
USA
Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes.