Mems and nems: systems, devices, and structures
Auteur :
Lyshevski, Sergey Edward
Éditeur :
Taylor & Francis Inc
ISBN :
9780849312625
Date de publication :
18 janv. 2002
Dimensions :
23,4 x 15,6 cm
Poids :
1040 g
Langue :
Anglais
Pays d'origine :
USA
The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.