Scientific wet process technology for innovative lsi/fpd manufacturing
Éditeur :
Taylor & Francis Inc
ISBN :
9780849335433
Date de publication :
21 déc. 2005
Dimensions :
25,4 x 17,8 cm
Poids :
900 g
Langue :
Anglais
Pays d'origine :
USA
Introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the molecule-reaction-based technologies. This book details the procedures and underlying concepts involved along with other wet process technologies and applications.