X-ray metrology in semiconductor manufacturing
Auteur :
Bowen, D. Keith / Tanner, Brian K.
Éditeur :
Taylor & Francis Inc
ISBN :
9780849339288
Date de publication :
24 janv. 2006
Dimensions :
23,4 x 15,6 cm
Poids :
544 g
Langue :
Anglais
Pays d'origine :
USA
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.