Mems: design and fabrication
Éditeur :
Taylor & Francis Inc
ISBN :
9780849391385
Date de publication :
29 nov. 2005
Dimensions :
25,4 x 17,8 cm
Poids :
1360 g
Langue :
Anglais
Pays d'origine :
USA
Details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. This volume offers an overview of MEMS materials and examines various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB[registered] technology, and deep reactive ion etching.