Mems: applications
Éditeur :
Taylor & Francis Inc
ISBN :
9780849391392
Date de publication :
29 nov. 2005
Dimensions :
25,4 x 17,8 cm
Poids :
1230 g
Langue :
Anglais
Pays d'origine :
USA
Offers an overview of various MEMS applications. This book surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others.