Micro-fluidic and micro-electromechanical system applications: subtractive processing of glass substrates
Éditeur :
Taylor & Francis Ltd
ISBN :
9781032747798
Date de publication :
26 mars 2026
Dimensions :
23,4 x 15,6 cm
Langue :
Anglais
Pays d'origine :
Grande Bretagne
The text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices.