Plasma electronics: applications in microelectronic device fabrication
Auteur :
Makabe, Toshiaki / Petrović, Zoran Lj.
Éditeur :
Taylor & Francis Ltd
ISBN :
9781041192237
Date de publication :
13 mai 2026
Dimensions :
23,4 x 15,6 cm
Poids :
950 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.