Materials and failures in mems and nems
Éditeur :
John Wiley & Sons Inc
ISBN :
9781119083603
Date de publication :
28 sept. 2015
Dimensions :
26,2 x 18,5 x 2,8 cm
Poids :
934 g
Langue :
Anglais
Pays d'origine :
USA
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.