Pulsed and pulsed bias sputtering: principles and applications
Auteur :
Barnat, Edward V.
Éditeur :
Barnat, Edward V.Lu, Toh-Ming,
ISBN :
9781402075438
Date de publication :
1 sept. 2003
Dimensions :
23,4 x 15,6 x 1,1 cm
Poids :
432 g
Format :
Laminated cover
Langue :
Anglais
Pays d'origine :
USA
Provides knowledge on the design of the instrumentation for pulsed and pulsed bias sputtering techniques as well as the knowledge for the control of thin film properties using the deposition parameters such as pulsing cycle and duty. This book focuses on the principles of the pulsed and pulsed bias sputter deposition of thin films.