Microlithography: science and technology
Éditeur :
Taylor & Francis Inc
ISBN :
9781439876756
Date de publication :
20 mai 2020
Dimensions :
25,4 x 17,8 cm
Poids :
1620 g
Langue :
Anglais
Pays d'origine :
USA
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.