Optical inspection of microsystems, second edition
Éditeur :
Taylor & Francis Inc
ISBN :
9781498779470
Date de publication :
25 juin 2019
Dimensions :
25,4 x 17,8 cm
Poids :
1360 g
Langue :
Anglais
Pays d'origine :
USA
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.