Introduction to semiconductor manufacturing technology
Auteur :
Xiao, Hong
Éditeur :
SPIE Press
ISBN :
9781510616530
Date de publication :
30 nov. 2012
Langue :
Anglais
Pays d'origine :
USA
Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.