Optical physics for nanolithography
Auteur :
Yen, Anthony / Yu, Shinn-Sheng
Éditeur :
SPIE Press
ISBN :
9781510617377
Date de publication :
30 mai 2018
Dimensions :
22,9 x 15,2 cm
Poids :
1020 g
Langue :
Anglais
Pays d'origine :
USA
Provides an in-depth, self-contained introduction of partially coherent imaging theory for researchers and engineers working on optical lithography for semiconductor manufacturing, including those in the EDA industry. It is mathematically complete: the opening chapters discuss the essential principles, and all derivations are presented with their intermediate steps.