Principles of lithography
Auteur :
Levinson, Harry J.
Éditeur :
SPIE Press
ISBN :
9781510627604
Date de publication :
30 juil. 2019
Poids :
1420 g
Langue :
Anglais
Pays d'origine :
USA
This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.