Photon sources for lithography and metrology
Éditeur :
SPIE Press
ISBN :
9781510653719
Date de publication :
31 oct. 2023
Poids :
1027 g
Langue :
Anglais
Pays d'origine :
USA
Photon sources enable the extension of lithography and metrology technologies forcontinued scaling of circuit elements and therefore are the key drivers for the extension of Moore's law. This volume is the authoritative reference on photon source technology and includes contributions from leading researchers and suppliers in the field.