Silicon carbide microelectromechanical systems for harsh environments
Auteur :
Cheung, Rebecca
Éditeur :
Imperial College Press
ISBN :
9781860946240
Date de publication :
30 juin 2006
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.