Metal impurities in silicon- and germanium-based technologies: origin, characterization, control, and device impact
Auteur :
Claeys, Cor / Simoen, Eddy
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783030067472
Date de publication :
30 janv. 2019
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.