Electrical atomic force microscopy for nanoelectronics
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783030156145
Date de publication :
25 août 2020
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development.