Mems: field models and optimal design
Auteur :
Di Barba, Paolo / Wiak, Slawomir
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783030214982
Date de publication :
14 août 2020
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.