Mechanical properties of silicon based compounds: silicides
Auteur :
Pelleg, Joshua
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783030226008
Date de publication :
14 août 2020
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.