Toward inertial-navigation-on-chip: the physics and performance scaling of multi-degree-of-freedom resonant mems gyroscopes
Auteur :
Wen, Haoran
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783030254728
Date de publication :
25 sept. 2020
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.